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Direct bonding

Direct bonding logo #10101) Semiconductor technology
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Direct bonding

Direct bonding logo #21000 Direct bonding describes a wafer bonding process without any additional intermediate layers. The bonding process is based on chemical bonds between two surfaces of any material possible meeting numerous requirements. These requirements are specified for the wafer surface as sufficiently clean, flat and smooth. Otherwise unbonded areas so called vo...
Found on http://en.wikipedia.org/wiki/Direct_bonding
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